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article · 2003

Open questions in electronic sputtering of solids by slow highly \ncharged ions with respect to applications in single ion implantation

In this article we discuss open questions in electronic sputtering of solids by slow, highly charged ions ("potential sputtering") in the context of their ap...

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Open questions in electronic sputtering of solids by slow highly \ncharged ions with respect to applications in single ion implantation