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article · 2001

Black layer coatings for the photolithographic manufacture of diffraction gratings

A black layer coating for an Al/photoresist interface is described with a reflectance less than 0.1% for 413 nm s-polarized light incident at 25º. It is made...

0 citationsDOI: https://doi.org/10.1364/oic.2001.thc2
Black layer coatings for the photolithographic manufacture of diffraction gratings