article · 2009
Monolithic Integration of Germanium Photodetectors and Silicon Wire Waveguides with Carrier Injection Structures
We integrated monolithically vertical p-i-n Ge photodetectors with variable optical attenuators (VOAs) based on Si wire rib waveguides with a carrier injecti...
2 citationsDOI: https://doi.org/10.1364/cleo.2009.ctuv2