article · 2002
Reduced intermodulation distortion of AlGaAs/InGaAs doped-channel FETs by air-bridge gate process
The conventional mesa isolation process in AlGaAs/InGaAs doped-channel FETs (DCFETs) results in the gate contacting the exposed highly n-type doped channel a...
1 citationsDOI: https://doi.org/10.1109/rfic.2001.935662