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article · 2006

Laser-based fabrication of a displacement sensor with an integrated high-accuracy position sensor

We present a high-accuracy force or displacement sensor made only of fused silica. This device merges integrated optics and micro-mechanics in a monolithic s...

1 citationsDOI: https://doi.org/10.1117/12.647881Open access
Laser-based fabrication of a displacement sensor with an integrated high-accuracy position sensor