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article · 1980

Room temperature carbon and oxygen determination in single-crystal silicon

ADVERTISEMENT RETURN TO ISSUEPREVArticleNEXTRoom temperature carbon and oxygen determination in single-crystal siliconD. Warren. VidrineCite this: Anal. Chem...

18 citationsDOI: https://doi.org/10.1021/ac50051a022

Room temperature carbon and oxygen determination in single-crystal silicon