article · 2011
Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology
In this paper we present a new fabrication method that combines for the first time popular SU-8 technology and PerMX dry-photoresist lamination for the manuf...
19 citationsDOI: https://doi.org/10.1063/1.3613668Open accessPDF reported by metadataFull text reported by metadata