article · 2008
Island Formation of SiC Film on Striated Si(001) Substrates
SiC growth on as-received and striated Si(001) substrates was studied. SiC films were grown by pulsed-jet chemical vapor deposition using monomethylsilane as...
1 citationsDOI: https://doi.org/10.4028/www.scientific.net/msf.600-603.227