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article · 2003

Planar silicon nitride waveguides for biosensing

The principles of attenuation of the light intensity due to multiple reflections are realised in a planar silicon oxide (SiO(2))silicon nitride (Si(3)N(4)) w...

10 citationsDOI: https://doi.org/10.1049/ip-nbt:20030571
Planar silicon nitride waveguides for biosensing