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article · 2003

Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering

Crystallographic structure of as-grown epitaxial Pb(Zr,Ti)O3 (PZT) films was investigated with regard to the Zr/Ti ratio and crystalline orientation. PZT fil...

100 citationsDOI: https://doi.org/10.1063/1.1558951
Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering