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article · 1991

Comparison of low temperature polysilicon crystal growth on low cost substrates

We have investigated the growth of silicon polycrystals from deposited amorphous films on several different substrates. Using Raman spectroscopy, x-ray diffr...

15 citationsDOI: https://doi.org/10.1116/1.577504
Comparison of low temperature polysilicon crystal growth on low cost substrates