article · 2007
Properties of ITO Films Deposited on Plastic Substrate by RF Superimposed DC Magnetron Sputtering Method
Tin doped indium oxide (ITO) films were deposited on plastic films by RF superimposed DC magnetron sputtering method using an In2O3 – 10 wt.% SnO2 target wit...
6 citationsDOI: https://doi.org/10.4028/www.scientific.net/ssp.124-126.367