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article · 1998

Imaging of layer by layer growth processes during molecular beam epitaxy of GaAs on (111)A substrates by scanning electron microscopy

When we use a scanning electron microscope-molecular beam epitaxy system with a GaAs (111)A substrate that dramatically improves the flatness of the growing ...

23 citationsDOI: https://doi.org/10.1063/1.122678
Imaging of layer by layer growth processes during molecular beam epitaxy of GaAs on (111)A substrates by scanning electron microscopy