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article · 1998

Chemistry and kinetics of chemical vapor deposition of pyrocarbon — III pyrocarbon deposition from propylene and benzene in the low temperature regime

119 citationsDOI: https://doi.org/10.1016/s0008-6223(97)00176-0
Chemistry and kinetics of chemical vapor deposition of pyrocarbon — III pyrocarbon deposition from propylene and benzene in the low temperature regime