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article · 2002

The effect of microtopography and deposition regime on the field emission properties of graphitelike carbon films

Technological factors controlling the formation of the microtopography of the surface of graphitelike carbon films deposited from the plasma of a microwave g...

1 citationsDOI: https://doi.org/10.1134/1.1535506
The effect of microtopography and deposition regime on the field emission properties of graphitelike carbon films