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article · 2012

Thermal-mechanical-noise-based CMUT characterization and sensing

When capacitive micromachined ultrasonic transducers (CMUTs) are monolithically integrated with custom-designed low-noise electronics, the output noise of th...

22 citationsDOI: https://doi.org/10.1109/tuffc.2012.2317
Thermal-mechanical-noise-based CMUT characterization and sensing