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article · 1998

Structural, optical, and electrical properties of doped hydrogenated diamond-like amorphous carbon films deposited using the dc saddle-field glow-discharge technique

The dc saddle-field glow-discharge technique was employed to deposit undoped, phosphorus-doped and boron-doped hydrogenated diamond-like amorphous carbon fil...

14 citationsDOI: https://doi.org/10.1116/1.581030
Structural, optical, and electrical properties of doped hydrogenated diamond-like amorphous carbon films deposited using the dc saddle-field glow-discharge technique