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article · 2010

Dislocation reduction in MOVPE grown GaN layers on (111)Si using SiNxand AlGaN layers

Growth of GaN on Si(111) potentially enables cost efficient manufacturing of optoelectronic devices due to the possibility of using cheap large area substrat...

26 citationsDOI: https://doi.org/10.1088/1742-6596/209/1/012017Open access
Dislocation reduction in MOVPE grown GaN layers on (111)Si using SiNxand AlGaN layers