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article · 2010

Dopant free multi-gate silicon nanowire CMOS-inverter on SOI substrate

In this work, we report on the fabrication and characterization of voltage-programmable (VP) nanowire (NW) field-effect-transistor (FET) devices suitable to ...

2 citationsDOI: https://doi.org/10.1109/dtis.2010.5487572
Dopant free multi-gate silicon nanowire CMOS-inverter on SOI substrate