article · 2013
Enhanced resputtering and asymmetric interface mixing in W/Si multilayers
During growth of multilayers by pulsed laser deposition (PLD), often both intermixing and resputtering occur due to the high kinetic energy of the particles ...
19 citationsDOI: https://doi.org/10.1007/s00339-013-7587-5Open accessPDF reported by metadataFull text reported by metadata