CitedEvidenceResearch APIs

Article

Article detail, metadata, authors, and available full-text links.

Paper reader

Loading paper...

article · 2011

Focused ion beam and electron microscopy characterization of nanosharp tips and microbumps on silicon and metal thin films formed via localized single-pulse laser irradiation

Cross-sections of laser fabricated nanosharp tips and microbumps on silicon and metal thin films are produced and examined in this work. These structures are...

17 citationsDOI: https://doi.org/10.1063/1.3524367
Focused ion beam and electron microscopy characterization of nanosharp tips and microbumps on silicon and metal thin films formed via localized single-pulse laser irradiation