article · 2006
A PLANAR GLASS/SI MICROMACHINING PROCESS FOR THE HEAT EXCHANGER IN A J-T CRYOSURGICAL PROBE
This paper reports a lithography-based microfabrication process and the preliminary experiments for a recuperative heat exchanger intended for use in a Joule...
5 citationsDOI: https://doi.org/10.31438/trf.hh2006.12Open accessPDF reported by metadataFull text reported by metadata