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report · 1997

The influence of convective heat transfer on flow stability in rotating disk chemical vapor deposition reactors

Flow and heat transfer of NH{sub 3} and He were studied in a rotating disk system with applications to chemical vapor deposition reactors. Flow field and dis...

0 citationsDOI: https://doi.org/10.2172/552758Open access
The influence of convective heat transfer on flow stability in rotating disk chemical vapor deposition reactors