report · 1978
Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon. Low Cost Silicon Solar Array Project. Quarterly progress report, January--March 1978
The purpose of the silane production program is to determine the feasibility and practicality of high-volume, low-cost production of silane (SiH/sub 4/) as a...
0 citationsDOI: https://doi.org/10.2172/6523257Open access