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report · 1978

Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon. Low Cost Silicon Solar Array Project. Quarterly progress report, January--March 1978

The purpose of the silane production program is to determine the feasibility and practicality of high-volume, low-cost production of silane (SiH/sub 4/) as a...

0 citationsDOI: https://doi.org/10.2172/6523257Open access
Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon. Low Cost Silicon Solar Array Project. Quarterly progress report, January--March 1978